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Data Process Logger (DPL)

Manufacture: Matsubo Corporation[Japan]

DPL software monitors the signals of 16 points in chamber, its data is recoded in PC.
So, the user can confirm whether the process has been operated as the pre-set parameter or not.



・Real-time monitoring (graph)
・List of monitoring 16 points
・Sampling Rate:100ms~10ms
・The logged data is recoded in PC as CSV extension(Excel)
・With DPL, you can easily monitor the discharged power, voltage, pressure in the chamber and the amount of gas


Monitoring for vacuum process, like sputtering, evaporating, Ion plating, etc.


*We are looking for local distributors.

Contact informationn Advanced Process Machinery Division
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